Nano-Space Online

Miniaturization not only has become mainstream in microelectronics, but also has influenced mechanical devices, giving a green light to the use of microelectromechanical systems (MEMS). Micromechanical devices are used in modern photography equipment, watches, mechanical drives of information storage systems, as well as in other spheres. Manufacturing of such devices demands great precision and quality control: parts of micromechanical devices must be precisely sized, and their surface must have a specified roughness degree. Electron microscopy is a convenient technique for controlling precision and quality standards when manufacturing micromechanical devices. More detail...